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We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10 5  around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining