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Superconducting nanowire single-photon detectors are an ideal match forintegrated quantum photonic circuits due to their high detection efficiency fortelecom wavelength photons. Quantum optical technology also requiressingle-photon detection with low dark count rate and high timing accuracy. Herewe present very low noise superconducting nanowire single-photon detectorsbased on NbTiN thin films patterned directly on top of Si3N4 waveguides. Wesystematically investigate a large variety of detector designs and characterizetheir detection noise performance. Milli-Hz dark count rates are demonstratedover the entire operating range of the nanowire detectors which also featurelow timing jitter. The ultra-low dark count rate, in combination with the highdetection efficiency inherent to our traveling wave detector geometry, givesrise to a measured noise equivalent power at the 10^(-20) W/Hz^(1/2) level.

Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rate