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In recent years, two-dimensional van der Waals materials have emerged as animportant platform for the observation of long-range ferromagnetic order inatomically thin layers. Although heterostructures of such materials can beconceived to harness and couple a wide range of magneto-optical andmagneto-electrical properties, technologically relevant applications requireCurie temperatures at or above room-temperature and the ability to grow filmsover large areas. Here we demonstrate the large-area growth of single-crystalultrathin films of stoichiometric Fe5GeTe2 on an insulating substrate usingmolecular beam epitaxy. Magnetic measurements show the persistence of softferromagnetism up to room temperature, with a Curie temperature of 293 K, and aweak out-of-plane magnetocrystalline anisotropy. Surface, chemical, andstructural characterizations confirm the layer-by-layer growth, 5:1:2 Fe:Ge:Testoichiometric elementary composition, and single crystalline character of thefilms.

Large-scale epitaxy of two-dimensional van der Waals room-temperature ferromagnet Fe5GeTe2