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Waste gas products from technological civilizations may accumulate in anexoplanet atmosphere to detectable levels. We propose nitrogen trifluoride(NF3) and sulfur hexafluoride (SF6) as ideal technosignature gases. Earth lifeavoids producing or using any N-F or S-F bond-containing molecules and makes nofully fluorinated molecules with any element. NF3 and SF6 may be universaltechnosignatures owing to their special industrial properties, which unlikebiosignature gases, are not species-dependent. Other key relevant qualities ofNF3 and SF6 are: their extremely low water solubility, unique spectralfeatures, and long atmospheric lifetimes. NF3 has no non-human sources and wasabsent from Earth's pre-industrial atmosphere. SF6 is released in only tinyamounts from fluorine-containing minerals, and is likely produced in onlytrivial amounts by volcanic eruptions. We propose a strategy to rule out SF6'sabiotic source by simultaneous observations of SiF4, which is released byvolcanoes in an order of magnitude higher abundance than SF6. Other fullyfluorinated human-made molecules are of interest, but their chemical andspectral properties are unavailable. We summarize why life on Earth-and perhapslife elsewhere-avoids using F. We caution, however, that we cannot definitivelydisentangle an alien biochemistry byproduct from a technosignature gas.

Fully fluorinated non-carbon compounds NF3 and SF6 as ideal technosignature gases