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This study describes a new two-step process to cool the thermal vibration of microcantilevers. The process combines active mechanical feedback cooling and optical cavity cooling. A micro-Fabry–Perot interferometer, built in-house, is set atop a microcantilever to measure the vibration amplitude, the high optical power density of which induces cavity cooling in the optical cavity. Using a two-step cooling procedure, the equivalent temperature of the thermal vibration of a microcantilever is lowered from room temperature to the theoretical cooling limit of 0.063 K, a much lower temperature than that achieved via simple cavity cooling (18 K), and then by mechanical feedback cooling (0.135 K) obtained for the same type of microcantilevers in previous studies. This experimental demonstration showcases a new type of cooling process of the amplitude of thermal vibration for micro-mechanical resonators to a lower temperature and does not need additional cooling using a conventional cryogenic refrigerator.

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever