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Heterostructures and crystal interfaces play a major role in state-of-the-art semiconductor devices and play a central role in the field of oxide electronics. In oxides the link between the microscopic properties of the interfaces and bulk properties of the resulting heterostructures challenge our fundamental understanding. Insights on the early growth stage of interfaces and its influence on resulting physical properties are scarce - typically the information is inferred from post growth characterization. Here, we report on real time measurements of the transport properties of SrTiO 3 -based heterostructures at room temperature, while the heterostructure is forming. Surprisingly, we detect a conducting interface already at the initial growth stage, much earlier than the well-established critical thickness limit for observing conductivity  ex-situ  after sample growth. We investigate how the conductivity depends on various physical processes occurring during pulsed laser depositions, including light illumination, particle bombardment by the plasma plume, interactions with the atmosphere and oxygen migration from SrTiO 3  to the thin films of varying compositions. We conclude that the conductivity in these room-temperature grown interfaces stem from oxygen vacancies with a concentration determined primarily by a balance between vacancy formation through particle bombardment and interfacial redox reaction and vacancy annihilation through oxidation. Using this approach, we propose a new design tool to control the electrical properties of interfaces in real time during their formation.

On the emergence of conductivity at SrTiO3-based oxide interfaces – an in-situ study