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Scanning micro-mirror actuators are silicon-based oscillatorymicro-electro-mechanical systems (MEMS). They enable laser distancemeasurements for automotive LIDAR applications as well as projection modulesfor the consumer market. For MEMS applications, the geometric structure istypically designed to serve a number of functional requirements. Mostimportantly, the mode spectrum contains a single high-Q mode, the drive mode,which per design is expected to yield the only resonantly excited geometricmotion during operation. Yet here, we report on the observation of a resonantthree-mode excitation via a process known as spontaneous parametricdown-conversion. We show that this phenomenon, most extensively studied in thefield of nonlinear optics, originates from three-wave coupling induced bygeometric nonlinearities. In combination with further Duffing-typenonlinearities, the micro mirror displays a variety of nonlinear dynamicalbehaviour ranging from stationary state bifurcations to dynamical instabilitiesobservable via amplitude modulations. We are able to explain and emulate allexperimental observations using a single fundamental model. In particular, ouranalysis allows us to understand the conditions for the onset of three-wavedown-conversion which if not accounted for in the design of the MEMS structure,can have drastic impact on its functionality even leading to fracture.

Spontaneous parametric down-conversion induced by non-degenerate three-wave mixing in a scanning MEMS micro mirror