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We report the fully-scalable fabrication of a large array of hybridmolybdenum disulfide (MoS$_2$) - silicon dioxide (SiO$_2$) one-dimensional,free-standing photonic-crystal cavities capable of enhancement of the MoS$_2$photoluminescence at the narrow cavity resonance. We demonstrate continuoustunability of the cavity resonance wavelength across the entire emission bandof MoS$_2$ simply by variation of the photonic crystal periodicity. Devicefabrication started by substrate-scale growth of MoS$_2$ using chemical vapordeposition (CVD) on non-birefringent thermal oxide on a silicon wafer; it wasfollowed by lithographic fabrication of a photon crystal nanocavity array onthe same substrate at more than 50% yield of functional devices. Our cavitiesexhibit three dominant modes with measured linewidths less than 0.2 nm,corresponding to quality factors exceeding 4000. All experimental findings arefound to be in excellent agreement with finite difference time domainsimulations.

Scalable Transfer-Free Fabrication of MoS$_2$/SiO$_2$ Hybrid Nanophotonic Cavity Arrays with Quality Factors Exceeding 4000