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The recent observation of high-harmonic generation from solids creates a newpossibility for engineering fundamental strong-field processes by patterningthe solid target with subwavelength nanostructures. All-dielectric metasurfacesexhibit high damage thresholds and strong enhancement of the driving field,making them attractive platforms to control high-harmonics and other high-fieldprocesses at nanoscales. Here we report enhanced non-perturbative high-harmonicemission from a Si metasurface that possesses a sharp Fano resonance resultingfrom a classical analogue of electromagnetically induced transparency. Harmonicemission is enhanced by more than two orders of magnitude compared tounpatterned samples. The enhanced high harmonics are highly anisotropic withexcitation polarization and are selective to excitation wavelength due to itsresonant feature. By combining nanofabrication technology and ultrafaststrong-field physics, our work paves the way for designing new compactultrafast photonic devices that operate under high intensities and shortwavelengths.

Enhanced High-Harmonic Generation from an All-Dielectric Metasurface