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Imaging systems operating in the terahertz part of the electromagneticspectrum are in great demand because of the distinct characteristics ofterahertz waves in penetrating many optically-opaque materials and providingunique spectral signatures of various chemicals. However, the use of terahertzimagers in real-world applications has been limited by the slow speed, largesize, high cost, and complexity of the existing imaging systems. Theselimitations are mainly imposed due to the lack of terahertz focal-plane arrays(THz-FPAs) that can directly provide the frequency-resolved and/ortime-resolved spatial information of the imaged objects. Here, we report thefirst THz-FPA that can directly provide the spatial amplitude and phasedistributions, along with the ultrafast temporal and spectral information of animaged object. It consists of a two-dimensional array of ~0.3 million plasmonicphotoconductive nanoantennas optimized to rapidly detect broadband terahertzradiation with a high signal-to-noise ratio. As the first proof-of-concept, weutilized the multispectral nature of the amplitude and phase data captured bythese plasmonic nanoantennas to realize pixel super-resolution imaging ofobjects. We successfully imaged and super-resolved etched patterns in a siliconsubstrate and reconstructed both the shape and depth of these structures withan effective number of pixels that exceeds 1-kilo pixels. By eliminating theneed for raster scanning and spatial terahertz modulation, our THz-FPA offersmore than a 1000-fold increase in the imaging speed compared to thestate-of-the-art. Beyond this proof-of-concept super-resolution demonstration,the unique capabilities enabled by our plasmonic photoconductive THz-FPA offertransformative advances in a broad range of applications that use hyperspectraland three-dimensional terahertz images of objects for a wide range ofapplications.

Plasmonic photoconductive terahertz focal-plane array with pixel super-resolution