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Visible and near-infrared spectrum photonic integrated circuits are quicklybecoming a key technology to address the scaling challenges in quantuminformation and biosensing. Thus far, integrated photonic platforms in thisspectral range have lacked integrated photodetectors. Here, we report the firstsilicon nitride-on-silicon waveguide photodetectors that are monolithicallyintegrated in a visible light photonic platform on silicon. Owing to aleaky-wave silicon nitride-on-silicon design, the devices achieved a highexternal quantum efficiency of > 60% across a record wavelength span from$\lambda$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and anavalanche gain-bandwidth product up to 173 $\pm$ 30 GHz. As an example, aphotodetector was integrated with a wavelength-tunable microring in a singlechip for on-chip power monitoring.

nature communications

Monolithically integrated, broadband, high-efficiency silicon  nitride-on-silicon waveguide photodetectors in a visible-light integrated  photonics platform