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High spectral purity frequency agile room temperature sources in theterahertz spectrum are foundational elements for imaging, sensing, metrology,and communications. Here we present a chip scale optical parametric oscillatorbased on an integrated nonlinear microresonator that provides broadly tunablesingle frequency and multi frequency oscillators in the terahertz regime.Through optical to terahertz down conversion using a plasmonic nanoantennaarray, coherent terahertz radiation spanning 2.8 octaves is achieved from 330GHz to 2.3 THz, with 20 GHz cavity mode limited frequency tuning step and 10MHz intracavity mode continuous frequency tuning range at each step. Bycontrolling the microresonator intracavity power and pump resonance detuning,tunable multi frequency terahertz oscillators are also realized. Furthermore,by stabilizing the microresonator pump power and wavelength, sub 100 Hzlinewidth of the terahertz radiation with 10-15 residual frequency instabilityis demonstrated. The room temperature generation of both single frequency,frequency agile terahertz radiation and multi frequency terahertz oscillatorsin the chip scale platform offers unique capabilities in metrology, sensing,imaging and communications.

Coherent terahertz radiation with 2.8-octave tunability through chip-scale photomixed microresonator optical parametric oscillation