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Fused silica glass is the preferred material in all applications whichrequire long-term chemical and mechanical stability as well as excellentoptical properties. The manufacturing of complex hollow microstructures withintransparent fused silica glass is of high interest for, among others, theminiaturization of chemical synthesis towards more versatile, configurable andenvironmentally friendly flow-through chemistry as well as high-quality opticalwaveguides or capillaries. However, microstructuring of such complexthree-dimensional structures has proven evasive due to the high thermal andchemical stability as well as mechanical hardness of glass. Here we present anapproach for the generation of hollow microstructures in fused silica glasswith unseen precision and freedom of three-dimensional designs. The processcombines the concept of sacrificial template replication with aroom-temperature molding process for fused silica glass. The fabricated glasschips are versatile tools for, among other, the advance of miniaturization inchemical synthesis on chip.

Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass