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Kerr nonlinearity based frequency combs and solitons have been generated fromon-chip optical microresonators with high quality factors and global or localanomalous dispersion. However, fabrication of such resonators usually requiresmaterials and/or processes that are not standard in semiconductor manufacturingfacilities. Moreover, in certain frequency regimes such as visible andultra-violet, the large normal material dispersion makes it extremely difficultto achieve anomalous dispersion. Here we present a concentric racetrack-shapedresonator that achieves anomalous dispersion in a 300 nm thick silicon nitridefilm, suitable for semiconductor manufacturing but previously thought to resultonly in waveguides with high normal dispersion, a high intrinsic Q of 1.5million, and a novel mode-selective coupling scheme that allows coherent combsto be generated. We also provide evidence suggestive of soliton-like pulseformation in the generated comb. Our method can achieve anomalous dispersionover moderately broad bandwidth for resonators at almost any wavelength whilestill maintaining material and process compatibility with high-volumesemiconductor manufacturing.

Frequency Comb Generation in 300 nm Thick SiN Concentric-Racetrack-Resonators: Overcoming the Material Dispersion Limit