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Unparalleled strength, chemical stability, ultimate surface-to-volume ratioand excellent electronic properties of graphene make it an ideal candidate as amaterial for membranes in micro- and nanoelectromechanical systems (MEMS andNEMS). However, the integration of graphene into MEMS or NEMS devices andsuspended structures such as proof masses on graphene membranes raises severaltechnological challenges, including collapse and rupture of the graphene. Wehave developed a robust route for realizing membranes made of double-layer CVDgraphene and suspending large silicon proof masses on membranes with highyields. We have demonstrated the manufacture of square graphene membranes withside lengths from 7 micro meter to 110 micro meter and suspended proof massesconsisting of solid silicon cubes that are from 5 micro meter multiply 5 micrometer multiply 16.4 micro meter to 100 micro meter multiply 100 micro metermultiply 16.4 micro meter in size. Our approach is compatible with wafer-scaleMEMS and semiconductor manufacturing technologies, and the manufacturing yieldsof the graphene membranes with suspended proof masses were greater than 90%,with more than 70% of the graphene membranes having more than 90% graphene areawithout visible defects. The graphene membranes with suspended proof masseswere extremely robust and were able to withstand indentation forces from anatomic force microscope (AFM) tip of up to ~7000 nN. The measured resonancefrequencies of the realized structures ranged from tens to hundreds of kHz,with quality factors ranging from 63 to 148. The proposed approach for thereliable and large-scale manufacture of graphene membranes with suspended proofmasses will enable the development and study of innovative NEMS devices withnew functionalities and improved performances.

Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications