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Preparing and manipulating quantum states of mechanical resonators is ahighly interdisciplinary undertaking that now receives enormous interest forits far-reaching potential in fundamental and applied science. Up to now, onlynanoscale mechanical devices achieved operation close to the quantum regime. Wereport a new micro-optomechanical resonator that is laser cooled to a level of30 thermal quanta. This is equivalent to the best nanomechanical devices,however, with a mass more than four orders of magnitude larger (43 ng versus 1pg) and at more than two orders of magnitude higher environment temperature (5K versus 30 mK). Despite the large laser-added cooling factor of 4,000 and thecryogenic environment, our cooling performance is not limited by residualabsorption effects. These results pave the way for the preparation of 100-umscale objects in the quantum regime. Possible applications range fromquantum-limited optomechanical sensing devices to macroscopic tests of quantumphysics.

Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity