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We report pulsed electron-spin resonance (ESR) measurements on an ensemble ofBismuth donors in Silicon cooled at 10mK in a dilution refrigerator. Using aJosephson parametric microwave amplifier combined with high-quality factorsuperconducting micro-resonators cooled at millikelvin temperatures, we improvethe state-of-the-art sensitivity of inductive ESR detection by nearly 4 ordersof magnitude. We demonstrate the detection of 1700 bismuth donor spins insilicon within a single Hahn echo with unit signal-to-noise (SNR) ratio,reduced to just 150 spins by averaging a single Carr-Purcell-Meiboom-Gillsequence. This unprecedented sensitivity reaches the limit set by quantumfluctuations of the electromagnetic field instead of thermal or technicalnoise, which constitutes a novel regime for magnetic resonance.

Reaching the quantum limit of sensitivity in electron spin resonance