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Metamaterials and metasurfaces represent a remarkably versatile platform for light manipulation, biological and chemical sensing, and nonlinear optics. Many of these applications rely on the resonant nature of metamaterials, which is the basis for extreme spectrally selective concentration of optical energy in the near field. In addition, metamaterial-based optical devices lend themselves to considerable miniaturization because of their subwavelength features. This additional advantage sets metamaterials apart from their predecessors, photonic crystals, which achieve spectral selectivity through their long-range periodicity. Unfortunately, spectral selectivity of the overwhelming majority of metamaterials that are made of metals is severely limited by high plasmonic losses. Here we propose and demonstrate Fano-resonant all-dielectric metasurfaces supporting optical resonances with quality factors Q>100 that are based on CMOS-compatible materials: silicon and its oxide. We also demonstrate that these infrared metasurfaces exhibit extreme planar chirality, opening exciting possibilities for efficient ultrathin circular polarizers and narrow-band thermal emitters of circularly polarized radiation.

Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances