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In epitaxially strained ferroelectric thin films and superlattices, theferroelectric transition temperature can lie above the growth temperature.Ferroelectric polarization and domains should then evolve during the growth ofa sample, and electrostatic boundary conditions may play an important role. Inthis work, ferroelectric domains, surface termination, average latticeparameter and bilayer thickness are simultaneously monitored using in-situsynchrotron x-ray diffraction during the growth of BaTiO$_3$/SrTiO$_3$superlattices on SrTiO$_3$ substrates by off-axis RF magnetron sputtering. Thetechnique used allows for scan times substantially faster than the growth of asingle layer of material. Effects of electric boundary conditions areinvestigated by growing the same superlattice alternatively on SrTiO$_3$substrates and 20nm SrRuO$_3$ thin films on SrTiO$_3$ substrates. Theseexperiments provide important insights into the formation and evolution offerroelectric domains when the sample is ferroelectric during the growthprocess.

In-situ x-ray diffraction and the evolution of polarization during the growth of ferroelectric superlattices