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The monolayer transition metal dichalcogenides have recently attracted muchattention owing to their potential in valleytronics, flexible and low-powerelectronics and optoelectronic devices. Recent reports have demonstrated thegrowth of large-size 2-dimensional MoS2 layers by the sulfurization ofmolybdenum oxides. However, the growth of transition metal selenide monolayerhas still been a challenge. Here we report that the introduction of hydrogen inthe reaction chamber helps to activate the selenization of WO3, wherelarge-size WSe2 monolayer flakes or thin films can be successfully grown.

Large-Area Aiming Synthesis of WSe2 Monolayers