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Measuring local temperature with a spatial resolution on the order of a fewnanometers has a wide range of applications from semiconductor industry overmaterial to life sciences. When combined with precision temperature measurementit promises to give excess to small temperature changes caused e.g. by chemicalreactions or biochemical processes. However, nanoscale temperature measurementsand precision have excluded each other so far owing to the physical processesused for temperature measurement of limited stability of nanoscale probes. Herewe experimentally demonstrate a novel nanoscale temperature sensing techniquebased on single atomic defects in diamonds. Sensor sizes range from millimeterdown to a few tens of nanometers. Utilizing the sensitivity of the opticallyaccessible electron spin level structure to temperature changes we achieve atemperature noise floor of 5 mK Hz$^{-1/2}$ for single defects in bulk sensors.Using doped nanodiamonds as sensors yields temperature measurement with 130 mKHz$^{-1/2}$ noise floor and accuracies down to 1 mK at length scales of a fewten nanometers. The high sensitivity to temperature changes together withexcellent spatial resolution combined with outstanding sensor stability allowsfor nanoscale precision temperature determination enough to measure chemicalprocesses of few or single molecules by their reaction heat even inheterogeneous environments like cells.

High precision nano scale temperature sensing using single defects in diamond