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More recently it has been shown by luminescence spectroscopy that photolysis of these molecules also readily produces diatomic metal-containing molecules in the gas phase. 5-11 These discoveries have assisted in the elucidation of the photolytic decomposition pathways relevant to laser-assisted chemical vapor deposition (LCVD). Both desired fragments (e.g., TiN in the LCVD of TiN films)11 and undesirable fragments containing heteroatoms that contaminate the final films (e.g., CuF, CrF, NiF, and PtC in the laser CVD of the respective metal films) 6-10 have been identified. The fluorinated acetylacetonate ligands (1,1,1,5,5,5-hexafluoro2-4-pentanedionate ) hfac) that were used in the latter studies provide good precursor volatility and allow for facile transport in the gas phase, but they may also result in fluorine and/or carbon contamination of the final deposit. 12-14

journal of the american chemical society

Sensitive Wavelength Dependence of PdC and Pd Formation from Photolysis of Bis(hexafluoroacetylacetonato)palladium(II) [J. Am. Chem. Soc. 2000, 122, 1227−1228].