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The recent discovery of room temperature intrinsic single-photon emitters insilicon nitride (SiN) provides the unique opportunity for seamless monolithicintegration of quantum light sources with the well-established SiN photonicplatform. In this work, we develop a novel approach to realize planarwaveguides made of low-autofluorescing SiN with intrinsic quantum emitters anddemonstrate the single-photon emission coupling into the waveguide mode. Theobserved emission coupling from these emitters is found to be in line withnumerical simulations. The coupling of the single-photon emission to awaveguide mode is confirmed by second-order autocorrelation measurements oflight outcoupled off the photonic chip by grating couplers. Fitting thesecond-order autocorrelation histogram yields $g^{(2)}(0)=0.35\pm0.12$ withoutspectral filtering or background correction with an outcoupled photon rate of$10^4$ counts per second. This demonstrates the first successful coupling ofphotons from intrinsic single-photon emitters in SiN to monolithicallyintegrated waveguides made of the same material. The results of our work pavethe way toward the realization of scalable, technology-ready quantum photonicintegrated circuitry efficiently interfaced with solid-state quantum emitters.

Silicon nitride waveguides with intrinsic single-photon emitters for integrated quantum photonics