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Semiconducting 2D materials, such as transition metal dichalcogenides (TMDs),are emerging in nanomechanics, optoelectronics, and thermal transport. In eachof these fields, perfect control over 2D material properties including strain,doping, and heating is necessary, especially on the nanoscale. Here, we studyclean devices consisting of membranes of single-layer MoS2 suspended on pillararrays. Using Raman and photoluminescence spectroscopy, we have been able toextract, separate and simulate the different contributions on the nanoscale andto correlate these to the pillar array design. This control has been used todesign a periodic MoS2 mechanical membrane with a high reproducibility and toperform optomechanical measurements on arrays of similar resonators with ahigh-quality factor of 600 at ambient temperature, hence opening the way tomulti-resonator applications with 2D materials. At the same time, this studyconstitutes a reference for the future development of well-controlled opticalemissions within 2D materials on periodic arrays with reproducible behavior. Wemeasured a strong reduction of the MoS2 band-gap induced by the straingenerated from the pillars. A transition from direct to indirect band gap wasobserved in isolated tent structures made of MoS2 and pinched by a pillar. Infully suspended devices, simulations were performed allowing both theextraction of the thermal conductance and doping of the layer. Using thecorrelation between the influences of strain and doping on the MoS2 Ramanspectrum, we have developed a simple, elegant method to extract the localstrain in suspended and non-suspended parts of a membrane. This opens the wayto experimenting with tunable coupling between light emission and vibration.

Intrinsic properties of suspended MoS2 on SiO2/Si pillar arrays for nanomechanics and optics