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Nanogranular material systems are promising for a variety of applications inresearch and development. Their physical properties are often determined bygrain sizes, shapes, mutual distances and by the chemistry of the embeddingmatrix With focused electron beam induced deposition arbitrarily shapednanocomposite materials can be designed, where metallic, nanogranularstructures are embedded in a carbonaceous matrix. Using "post-growth" electronbeam curing, these materials can be tuned for improved electric transport ormechanical behavior. Such an optimization necessitates a thorough understandingand characterization of the internal changes in chemistry and morphology, whichis where conventional projection based imaging techniques fall short. Here, weapply scanning transmission electron tomography to get a comprehensive pictureof the distribution and morphology degree of embedded Pt nanograins afterinitial fabrication, and we demonstrate the impact of electron beam curing,which leads to condensed regions of interconnected metal nanograins.

Analyzing Nanogranularity of Focused Electron-Beam-Induced Deposited (FEBID) Materials by Electron Tomography