Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical–Mechanical Planarization Cleaning | Zendy

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Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical–Mechanical Planarization Cleaning

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