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Strain engineering is one of the most effective approaches to manipulate thephysical state of materials, control their electronic properties, and enablecrucial functionalities. Because of their rich phase diagrams arising fromcompeting ground states, quantum materials are an ideal playground foron-demand material control, and can be used to develop emergent technologies,such as adaptive electronics or neuromorphic computing. It was recentlysuggested that complex oxides could bring unprecedented functionalities to thefield of nanomechanics, but the possibility of precisely controlling the stressstate of materials is so far lacking. Here we demonstrate the wide andreversible manipulation of the stress state of single-crystal WO3 by strainengineering controlled by catalytic hydrogenation. Progressive incorporation ofhydrogen in freestanding ultra-thin structures determines large variations oftheir mechanical resonance frequencies and induces static deformation. Ourresults demonstrate hydrogen doping as a new paradigm to reversibly manipulatethe mechanical properties of nanodevices based on materials control.

Large tunability of strain in WO3 single-crystal microresonators controlled by exposure to H2 gas