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Flexible electronic devices are normally based on organic polymer substrate. In this work, an ultrathin glass-based flexible, transparent, and ultrasensitive ZnO/glass surface acoustic wave (SAW) humidity sensor is developed using a composite sensing layer of ZnO nanowires (NWs) and graphene quantum dots (GQDs). It shows much larger effective electromechanical coupling coefficients and signal amplitudes, compared to those of flexible polymer-based SAW devices reported in the literature. Attributed to large specific surface areas of ZnO NWs, large numbers of hydrophilic functional groups of GQDs, as well as the formation of p-n heterojunctions between GQDs and ZnO NWs, the developed ZnO/glass flexible SAW sensor shows an ultrahigh humidity sensitivity of 40.16 kHz/% RH, along with its excellent stability and repeatability. This flexible and transparent SAW sensor has demonstrated insignificant deterioration of humidity sensing performance, when it is bent on a curved surface with a bending angle of 30°, revealing its potential applications for sensing on curved and complex surfaces. The humidity sensing and human breathing detection have further been demonstrated for wearable electronic applications using ultrathin glass-based devices with completely inorganic materials.

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots