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Doping ferroelectric Hf0.5Zr0.5O2 with La is a promising route to improveendurance. However, the beneficial effect of La on the endurance ofpolycrystalline films may be accompanied by degradation of the retention. Wehave investigated the endurance - retention dilemma in La-doped epitaxialfilms. Compared to undoped epitaxial films, large values of polarization areobtained in a wider thickness range, whereas the coercive fields are similar,and the leakage current is substantially reduced. Compared to polycrystallineLa-doped films, epitaxial La-doped films show more fatigue but there is notsignificant wake-up effect and endurance-retention dilemma. The persistentwake-up effect common to polycrystalline La-doped Hf0.5Zr0.5O2 films, islimited to a few cycles in epitaxial films. Despite fatigue, endurance inepitaxial La-doped films is more than 1010 cycles, and this good property isaccompanied by excellent retention of more than 10 years. These resultsdemonstrate that wake-up effect and endurance-retention dilemma are notintrinsic in La-doped Hf0.5Zr0.5O2.

Epitaxial Ferroelectric La-doped Hf0.5Zr0.5O2 Thin Films