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Atomic resolution imaging in transmission electron microscopy (TEM) andscanning TEM (STEM) of light elements in electron-transparent materials haslong been a challenge. Biomolecular materials, for example, are rapidly alteredwhen illuminated with electrons. These issues have driven the development ofTEM and STEM techniques that enable the structural analysis of electronbeam-sensitive and weakly scattering nano-materials. Here, we demonstrate sucha technique, STEM holography, capable of absolute phase and amplitude objectwave measurement with respect to a vacuum reference wave. We use anamplitude-dividing nanofabricated grating to prepare multiple spatiallyseparated electron diffraction probe beams focused at the sample plane, suchthat one beam transmits through the specimen while the others pass throughvacuum. We raster-scan the diffracted probes over the region of interest. Weconfigure the post specimen imaging system of the microscope to diffractionmode, overlapping the probes to form an interference pattern at the detector.Using a fast-readout, direct electron detector, we record and analyze theinterference fringes at each position in a 2D raster scan to reconstruct thecomplex transfer function of the specimen, t(x). We apply this technique toimage a standard target specimen consisting of gold nanoparticles on a thinamorphous carbon substrate, and demonstrate 2.4 angstrom resolution phaseimages. We find that STEM holography offers higher phase-contrast of theamorphous material while maintaining Au atomic lattice resolution when comparedwith high angle annular dark field STEM.

Probing Light Atoms at Sub-nanometer Resolution: Realization of Scanning Transmission Electron Microscope Holography