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Ultrathin nanopore membranes based on 2D materials have demonstrated ultimateresolution toward DNA sequencing. Among them, molybdenum disulphide (MoS2)shows long-term stability as well as superior sensitivity enabling highthroughput performance. The traditional method of fabricating nanopores withnanometer precision is based on the use of focused electron beams intransmission electron microscope (TEM). This nanopore fabrication process istime-consuming, expensive, not scalable and hard to control below 1 nm. Here,we exploited the electrochemical activity of MoS2 and developed a convenientand scalable method to controllably make nanopores in single-layer MoS2 withsub-nanometer precision using electrochemical reaction (ECR). Theelectrochemical reaction on the surface of single-layer MoS2 is initiated atthe location of defects or single atom vacancy, followed by the successiveremovals of individual atoms or unit cells from single-layer MoS2 lattice andfinally formation of a nanopore. Step-like features in the ionic currentthrough the growing nanopore provide direct feedback on the nanopore sizeinferred from a widely used conductance vs. pore size model. Furthermore, DNAtranslocations can be detected in-situ when as-fabricated MoS2 nanopores areused. The atomic resolution and accessibility of this approach paves the wayfor mass production of nanopores in 2D membranes for potential solid-statenanopore sequencing.

Electrochemical reaction in single layer MoS2: nanopores opened atom by atom