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A Si(Li) detector and a multichannel analyzer system were combined with a multiple anode soft x-ray generator and a high vacuum sample handling system to provide an x-ray fluorescence unit for quantitative analyses of the elements from oxygen to iron. A relatively rapid, accurate, and reproducible sample preparation technique and a method for sample matrix absorption corrections are described. (auth)

Nondispersive soft x-ray fluorescence spectrometer for quantitative analysis of the major elements in rocks and minerals