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4D-STEM, in which the 2D diffraction plane is captured for each 2D scanposition in the scanning transmission electron microscope (STEM) using apixelated detector, is complementing and increasingly replacing existingimaging approaches. However, at present the speed of those detectors, althoughhaving drastically improved in the recent years, is still 100 to 1,000 timesslower than the current PMT technology operators are used to. Regrettably, thismeans environmental scanning-distortion often limits the overall performance ofthe recorded 4D data. Here we present an extension of existing STEM distortioncorrection techniques for the treatment of 4D-data series. Although applicableto 4D-data in general, we use electron ptychography and electric-field mappingas model cases and demonstrate an improvement in spatial-fidelity,signal-to-noise ratio (SNR), phase-precision and spatial-resolution.

Increasing Spatial Fidelity and SNR of 4D-STEM using Multi-frame Data Fusion