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Atom probe tomography is a powerful tools in investigating nanostructuressuch as interfaces and nanoparticles in material science. Advanced analysistools are particularly useful for analyzing these nanostructures characterizedvery often by curved shapes. However, these tools are very limited for complexmaterials with non-negligible peak overlaps in their respective mass-to-chargeratio spectra. Usually, an analyst solves peak overlaps in the bulk regions butthe behavior at interfaces is rarely considered. Therefore, in this work wedemonstrate how the proximity histogram generated for a specific interface canbe corrected by using the natural abundances of isotopes. This leads tooverlap-solved proximity histograms with a resolution of up to 0.1 nm. Thiswork expands on previous work that showed the advantage of a maximum likelihoodpeak overlap solving. The corrected proximity histograms together with themaximum likelihood peak overlap algorithm were implemented in an user-friendlysoftware suite called EPOSA.

Solving peak overlaps for proximity histogram analysis of complex interfaces for atom probe tomography data