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An accurate determination of specimen thickness is essential for quantitativeanalytical electron microscopy. Here we demonstrate that a position-averagedincoherent bright-field signal recorded on an absolute scale can be used todetermine the thickness of on-axis crystals with a precision of \pm1.6 nm. Thismethod measures both the crystalline and the non-crystalline parts (surfaceamorphous layers) of the sample. However, it avoids the systematic errorresulting from surface plasmons contributions to the inelastic mean free paththickness estimated by electron energy loss spectroscopy.

Determining On-Axis Crystal Thickness with Quantitative Position-Averaged Incoherent Bright-Field Signal in an Aberration-corrected STEM