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We use a piezoelectric quartz tuning fork to calibrate the displacement ofceramic piezoelectric scanners which are widely employed in scanning probemicroscopy. We measure the static piezoelectric response of a quartz tuningfork and find it to be highly linear, non-hysteretic and with negligible creep.These performance characteristics, close to those of an ideal transducer, makequartz transducers superior to ceramic piezoelectric actuators. Furthermore,quartz actuators in the form of a tuning fork have the advantage of yieldingstatic displacements comparable to those of local probe microscope scanners. Weuse the static displacement of a quartz tuning fork as a reference to calibratethe three axis displacement of a ceramic piezoelectric scanner. Although thiscalibration technique is a non-traceable method, it can be more versatile thanusing calibration grids because it enables to characterize the linear andnon-linear response of a piezoelectric scanner in a broad range ofdisplacements, spanning from a fraction of a nanometer to hundreds ofnanometers. In addition, the creep and the speed dependent piezoelectricresponse of ceramic scanners can be studied in detail.

Calibration of piezoelectric positioning actuators using a reference voltage-to-displacement transducer based on quartz tuning forks