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Seyonic is developing a family of high-speed micro flow sensors with full-scale sensitivities between 0.25 and 10 microliter per second. The flow rate is determined by the measurement of a pressure difference across a fluidic restriction, using two integrated piezo-resistive pressure sensors. Main applications are in sub-microliter dispensing systems, where both sensor accuracy and speed provide real-time validation of the requested liquid volumes. The very fast response of the sensor, less than 2 ms, allows for measurement of liquid volumes down to the nL range. The sensor is able to measure not only the flow, but also the instantaneous pressure in the systems under evaluation. It is therefore possible to obtain valuable information on the system's operation for the characterization of fluidic components such as micromachined pumps, solenoid valves and jet dispensers

High-Speed Flow Sensing as a Diagnostic Tool in the Development of Microfluidic Systems