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In this paper, we have analysed the depth resolution that can be achieved byon-axis transmission Kikuchi diffraction (TKD) using a Zr-Nb alloy. The resultsindicate that the signals contributing to detectable Kikuchi bands originatefrom a depth of approximately the mean free path of thermal diffuse scattering(lambdaTDS) from the bottom surface of a thin foil sample. This existingsurface sensitivity can thus lead to the observation of different grainstructures when opposite sides of a nano-crystalline foil are facing theincident electron beam. These results also provide a guideline for the idealsample thickness for TKD analysis of 6lambdaTDS, or 21 times the elasticscattering mean free path (lambdaMFP) for samples of high crystal symmetry. Forsamples of lower symmetry, a smaller thickness 3lambdaTDS, or 10lambdaMFP issuggested.

On the depth resolution of transmission Kikuchi diffraction (TKD) analysis