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A novel microfabricated, all-electrical measurement platform is presented fora direct, accurate and rapid determination of the thermal conductivity anddiffusivity of liquid and solid materials. The measurement approach is based onthe bidirectional 3-omega method. The platform is composed of glass substrateson which sensor structures and a very thin dielectric nanolaminate passivationlayer are fabricated. Using through-glass vias for contacting the sensors fromthe chip back side leaves the top side of the platform free for deposition,manipulation and optical inspection of the sample during 3-omega measurements.The thin passivation layer, which is deposited by atomic layer deposition onthe platform surface, provides superior chemical resistance and allows for themeasurement of electrically conductive samples, while maintaining theconditions for a simple thermal analysis. We demonstrate the measurement ofthermal conductivities of borosilicate glass, pure water, glycerol, 2-propanol,PDMS, cured epoxy, and heat-sink compounds. The results compare well with bothliterature values and values obtained with the steady-state divided bar method.Small sample volumes (~0.02 mm$^2$) suffice for accurate measurements using theplatform, allowing rapid temperature-dependent measurements of thermalproperties, which can be useful for the development, optimization and qualitytesting of many materials, such as liquids, gels, pastes and solids.

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples