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We report the generation of small bandwidth highly coherent extreme ultraviolet radiation and the application of this source in coherent diffractive transmission microscope. Using a focussed narrow-bandwidth high harmonic generation (HHG) source with wavelength around 30 nm we achieve a resolution of ∼45 nm with a sample size down to 3 μm × 3 μm in a very short exposure time of <8 s. The experimental scheme is able for imaging sub-10 nm scale objects with an inexpensive table-top, commercially available femtosecond laser system

Generation of highly coherent extreme ultraviolet source and its application in diffraction imaging