English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Zendy Plus

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Zendy Tools

Zendy Open

In this work, we report a unique on-chip approach of cancelling feedthrough applied to a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS resonator fully immersed in deionized (DI) water to enhance the signal-to-background ratio (SBR) in the context of full electrical characterization. We experimentally validate the proposed technique by demonstrating an SBR as high as 25dB despite a reasonably low quality factor (Q) of 162 and high dielectric constant of water from a reference SBR of 3.45dB. The proposed technique employs a pair of differential inputs where one input actuates the device while the other input cancels feedthrough and targets package-level parasitic elements associated with measuring in water. The resulting net feedthrough capacitance is reduced from 185fF to just 2.04fF in DI water. These results are based on a simple practical setup where the fabricated device is interfaced with a customized printed circuit board (PCB) by wire-bonds.

On-chip Feedthrough Cancellation Technique for Enhanced Electrical Characterization of a Piezoelectric MEMS Resonator in Water