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Intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films has been investigated from the viewpoint of diaphragm buck- ling behavior for highly sensitive structures of piezoelectric ultrasonic microsensors. Since upward-buckled diaphragms of the sensors yield higher sensitivity than flat or downward ones, a fabrication process which enables the diaphragms to buckle sponta- neously upward was developed owning to intrinsic tensile stress of the PZT films. To control the intrinsic stress as adequate for the upward buckling, calcination temperature in the sol-gel deposition process has been modified in the range from 300∘C to 400∘C. The stress has decreased with increasing the temperature in the range and the 400∘C-calcined PZT films have shown a suitable stress for the buckling deflection and probability of upward buckling for the sensor diaphragms

Intrinsic Stress Control of Sol-Gel Derived PZT Films for Buckled Diaphragm Structures of Highly Sensitive Ultrasonic Microsensors