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In the field of material synthesis using chemically-derived technique, nanostructuring metal catalyst particles towards high quality production of carbon nanotubes (CNTs) has been very attractive. In this work, cobalt (Co) which used as catalyst for vertical growth of CNTs were studied by means of transmission electron microscopy (TEM), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS). Aluminum (Al) films (20 nm) were thermally-oxidized to form aluminum oxide (Al-O) to support 0.5 nm Co catalyst during CNT growth. In growing CNTs by using chemical vapor deposition (CVD) technique, the role and characters of all involving materials are crucial to the growth result. From the Co/Al-O substrate and at 650°C of CVD temperature, 33-μm thick of vertically aligned single-walled CNT (VA-SWCNT) forest has been grown. TEM particle analysis revealed that the Co particles have an average of 3.50 nm experimentally and in principle favored the growth of highly demanded VA-SWCNTs. The as-prepared Co particles are suggested chemically active for the CNT growth. In addition, XPS analysis confirmed the surface chemical state of Co particles prior to the VA-SWCNT growth using ethanol based CVD system

Nanostructuring Ultra-thin Co Films to Active Catalyst Particles for Vertically Aligned Single-walled CNT Growth