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FEBIP –focused electron beam induced processing- is a novel technology which renders outstanding advantages compared to other miniaturization techniques, like electron beam lithography, deep X-ray lithography, or 3D construction by optical polymerization. The principle, process characteristics, outstanding results and a variety of possible applications is described

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Focused Electron Beam Induced Processing, a Technology to Develop and Produce Miniaturized Electron-, IR, THz-, X-ray Sources, High Resolution Detectors and Sensors for IR-and X-ray Tomography