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Microfluidic devices for lab-on-a-chip applications have become obvious in the past decade. Often, small amounts of liquids need to be handled accurately and at a low power cost. Especially when autonomy is desired, the presence of on-chip micro actuators becomes obvious.In this paper, a novel family of microfluidic devices based on the electrostatic actuation principle is presented, which enables low-power, on-chip actuation. The fabrication process employs thin film technology and the usage of flexible, biocompatible materials. Characterization of micro valves is investigated from a static and dynamic point of view, yielding reproducible on-off behaviour and a maximum liquid volume displacement rate of 23nl/s at 400 cycles/s

Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms