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In this paper, we report a method to extract important parameters such as quality factor, motional transconductance and resonant frequency directly from the measured electrical transmission characteristic of a piezoresistively-sensed MEMS resonator embedded in feedthrough. The method has been applied to measurements for a square-extensional mode resonator where the resonant peak is only 0.22dB due to substantial feedthrough. The extracted parameters, derived using this method compare well with the corresponding values obtained using a Lorentzian fit to within 5%

Direct Parameter Extraction for Piezoresistively-sensed MEMS Resonators Embedded in Parasitic Capacitive Feedthrough