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We show how to achieve large-amplitude oscillation and good phase noise characteristics in a nonlinear NEMS oscillator by using a softening nonlinearity to locally balance the hardening behaviour of the Duffing nonlinearity for a given motion amplitude. This design approach makes it possible to relax the constraints on the electronic feedback circuitry of NEMS reference oscillators or resonant sensors. The case when the softening behaviour is obtained via electrostatic biasing is theoretically investigated for a fully-capacitive pulse-actuated resonant structure. This is validated by simulated data, in the case of a resonant clamped-clamped beam

Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities