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A fully integrated magnetic driven MEMS Micro-valve providing pulsed jets was developed and characterized for active aerodynamic control. The device is composed of a microvalve, a magnetostatic actuator and a packaging allowing accurate positioning on the models or prototypes. The microvalve is a resonator actuated by a specific coupling between an inductive driving coil and a NdFeB permanent magnet. The generated force was optimized to provide 250mN at 0.5A. High momentum rate, fully modulated pulsed jets have been obtained in the frequency range [0 – 500Hz] with velocities up to 150m/s. The actuation method allowed a good control over the pulsed jets characteristics that reached the required values for real scale automotive and aeronautic flow control experiments

Magnetostatic Microvalve for High Momentum Rate Pulsed Jet Generation