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Nanoscale 3D surface modifications, by scanning tunneling microscopy underambient conditions, of La0.7Sr0.3MnO3 thin films have been performed. It wasdemonstrated that there are well defined combinations of bias voltages and scanspeeds which allow for controlled surface structuring. Lateral structures withsizes down to 1.5 nm are possible to obtain. Moreover, it is possible toreproducibly control the depth of etching with half a unit cell precision,enabling design of 3D surface structures and control of the surface terminationof La0.7Sr0.3MnO3 through etching.

3D nanostructuring of La0.7Sr0.3MnO3 thin film surfaces by scanning tunnelling microscopy