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Nanopore formation upon heat treatment of hydrocarbon-siliconoxide hybrid lms was investigated by means of the variable-energy positron annihilation γ-ray and lifetime techniques. The lms were prepared using plasma enhanced chemicalvapor deposition (PECVD),and nanoscopic poresinthe lms weredeveloped throughthe decom positionofasacricialhydrocarbonous porogenbyannealingthe lmsat temperaturesupto600°C.Asaresultofthe positron annihilation γ-ray measurements, the line-shape S parameter increases with increasing annealing temperature from 150°C to 400°C, while it reduces with further increasing temperature. This suggests that more positronium annihilate with carbonous elements remaining on the wall of pores formed at temperatures up to 400°C. The lifetime measurements revealed the nanopore sizes in the range from 0.2 nm3 to 2.0 nm3. With increasing the pore size the lm refractive index reduced from 1.44 to 1.29. The variable-energy positron techniques were demonstrated to be useful to examine the nanoporosity evolution for porous PECVD lms

Variable-energy Positron Study of Nanopore Structure in Hydrocarbon–Siliconoxide Hybrid PECVD Films